High Vacuum/High Pressure

In addition to other extreme environmental conditions such as high temperature, radiation levels and magnetic fields, Capacitec non-contact displacement sensors have been used in applications with high vacuum and pressure application condition.

Example of high pressure is the axial positioning of a shaft in a hydrogen turbo pump.

High vacuum applications: Ceramic wafer production in a clean Room

Typical High Vacuum/High Pressure Displacement Sensor Applications:

• Displacement measurements at - 240°C with high vacuum of 10-8 torr
• Particle accelerators
• Semiconductor Equipment
• Diesel fuel injectors
• Chemical Vapor Deposition (CVD)
• Turbochargers
• High vacuum and Cryogenic Processes